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Initial stages of ZrO2 chemical vapour deposition on Si(100)-(2x1) from zirconium tetra-tert-butoxide.
Uppsala University.
Mälardalen University, School of Sustainable Development of Society and Technology. Mälardalen University, Department of Biology and Chemical Engineering.
Uppsala University.
Uppsala University.
2008 (English)In: Surface Science, Vol. 602, no 10, p. 1803-1809Article in journal (Refereed) Published
Abstract [en]

The initial stages of chemical vapor deposition of ZrO2 from zirconium tetra-tert-butoxide (ZTB) on Si(100)-(2x1) have been studied by Scanning Tunneling Microscopy (STM) and synchrotron radiation excited Photoelectron Spectroscopy (PES). The STM images and core level (PES) spectra indicate that the predominant surface modifications induced by ZTB are due to silicon carbonization and formation of zirconium dioxide. The carbonization reaction leads to formation of subsurface carbon and two types of reconstructions are discussed: dimer vacancies and dimer vacancies in conjunction with a rotated surface Si-dimer. Indications for the formation of small amounts of zirconium silicide are also found. No evidence for silicon oxidation can be observed with PES, in contrast to the interface properties previously found after larger exposures to ZTB.

Place, publisher, year, edition, pages
2008. Vol. 602, no 10, p. 1803-1809
Keywords [en]
High k dielectrics; Zirconium dioxide; Silicon; Chemical vapor deposition; Semiconductor-insulator interfaces; Synchrotron radiation photoelectron spectroscopy; Scanning tunneling microscopy
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:mdh:diva-3127DOI: 10.1016/j.susc.2008.03.016ISI: 000256815900013Scopus ID: 2-s2.0-43849086507OAI: oai:DiVA.org:mdh-3127DiVA, id: diva2:115791
Available from: 2008-03-31 Created: 2008-03-31 Last updated: 2013-12-30Bibliographically approved

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School of Sustainable Development of Society and TechnologyDepartment of Biology and Chemical Engineering
Condensed Matter Physics

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CiteExportLink to record
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Citation style
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  • nn-NB
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  • asciidoc
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